RFID-Based Thermal Convection Floating Type Accelerometer with Different Packaging Chambers and Filled Gases

Abstract:

This research proposes a wireless RFID-based thermal convection accelerometer, and relates for the technology to manufacture and package it on a flexible substrate. The key technology is to integrate both a thermal convection accelerometer and a wireless RFID antenna on the same substrate, such that the accelerometer is very convenient for fabrication and usage. In this paper the heaters as well as the thermal sensors are made on the surface of the flexible substrate with the traditional floating structure. In addition, the inner shape of the chamber can be as hemi-cylindrical and hemi-spherical ones instead of the conventional rectangular type. Comparisons are also made, the sensitivity of the new proposed semi-spherical design with Xe gas is better at lower accelerations.

• Periodical: Applied Mechanics and Materials (Volumes 321-324)
• Pages: 573-577
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.321-324.573
• Online since: June 2013
• Authors: Jium Ming Lin, Cheng Hung Lin
• Keywords: Flexible Substrate, Floating Type Accelerometer, Hemi-Cylindrical Chamber, Hemi-Spherical Chamber, Rectangular Chamber, RFID-Based, Thermal Convection, Xenon Gas

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