Production and Developing Trends of Gold Alloys Magnetron Sputtering Target

Abstract:

For the reason of outstanding performance and unique character, gold alloys coating materials produced by Magnetron sputtering were used widely and widely. As source material for coating, the quality of gold alloys target has great effects on sputtering technological parameters and performances of coatings. This paper mainly describes the production,application of gold alloys sputtering target as well as the present status and developing trends in the future

• Periodical: Applied Mechanics and Materials (Volume 331)
• Pages: 492-496
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.331.492
• Online since: July 2013
• Authors: Zhuo Cao, Qin Zhang, Ying Li
• Keywords: Developing Trend, Gold Alloy, Magnetron Sputtering Target, Technical Requirement

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