Study on Effect of Van Der Waals Force and Casimir Force to Microsystem

Abstract:

Based on the electrostatic comb drive structure, the comb will do relative motion when it is driven up, and the space between them will be less than 1μm. Considering the micro-scale effect, the Van der Waals force and the Casimir force is used to analyze the influence on the micro-structure, compared with the electrostatic force. The van der Waals force and the Casimir force is almost equivalent to the electrostatic force when the initial gap of the micro-structure and the relative displacement between the micro-structure is relatively small. Therefore the van der Waals force and the Casimir force play an important role in the micro-structure and cannot be ignored.

• Periodical: Applied Mechanics and Materials (Volumes 336-338)
• Pages: 944-948
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.336-338.944
• Online since: July 2013
• Authors: Yan Wei Guan, Shi Qiao Gao, Li Shen, Yun Li He
• Keywords: Casimir Force, Van der Waals Force

References

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[2] QianFeng and WanlinGuo: The effect of Casimir forceto the performance of the micro-accelerometer[D] (Nanjing University of Aeronautics and Astronautics, Nanjing 2005).

[3] ZhiyongChen, ZhongyuGao and BinZhou: submitted to Chinese Journal of Mechanical Engineering(2001).