Sensitivity and Response of a Triple-Axis Thermal MEMS-Based Acceleration Sensor

Xuan Thien Dinh; Yoshifumi Ogami

doi:10.4028/www.scientific.net/AMM.339.64

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 339Sensitivity and Response of a Triple-Axis Thermal...

Sensitivity and Response of a Triple-Axis Thermal MEMS-Based Acceleration Sensor

Abstract:

This paper investigates numerically the sensitivity and response of a novel tripleaxis thermal MEMSbased acceleration sensor. In this novel sensor, the heater forms an open ring on the top of a cavity, which improves the variation of temperature in the region just above the cavity center with vertical acceleration. By placing a temperature detector in this region, the sensitivity of vertical measurement is significantly improved and comparable with that of horizontal measurement whose detectors are outside the heater loop. Furthermore, the mutual effect is dramatically reduced. For instance, at the supplied power of 15mW to the heater, the sensitivity for the vertical measurement attains 0.062°C/g (g is gravity) while those for the horizontal measurements are 0.29°C/g, and cross sensitivities are less than 5%, for acceleration within 10g. The numerical analysis of response of the sensor shows that the sensor frequency bandwidth at 3 dB is about 70 Hz.

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Periodical:

Applied Mechanics and Materials (Volume 339)

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64-68

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.339.64

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Online since:

July 2013

Authors:

Xuan Thien Dinh, Yoshifumi Ogami

Keywords:

Buoyancy Flow, MEMS, Thermal Accelerometer

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