Design of 2-DOF Micro-Positional Stage Based on Parallel Structure Using Flexible Plate
A new prototype of 2-DOF micro-positional stage was designed based on parallel structure according to the following requirements of the stage, such as, symmetrical structures in X and Y directions, decoupling movement in X and Y directions, large operating surface, and more simple and compact structure. Using double flexible arched plate, the specified structure of the stage was designed by considering the realization of its movement. Static and dynamic characteristics of the stage have been analyzed by using the finite element method. For the static performance, there is a linear relationship between the displacement of the stage and its driving force. The maximum displacement of the stage is about 36 μm under the maximum force 650 N. For dynamic performance, the natural frequency and the response time of the stage are about 2.4 kHz and 1.4 ms, respectively.
Yi-Min Deng, Aibing Yu, Weihua Li and Di Zheng
H. Chun et al., "Design of 2-DOF Micro-Positional Stage Based on Parallel Structure Using Flexible Plate", Applied Mechanics and Materials, Vols. 37-38, pp. 317-321, 2010