An Improvement Inspection Policy for C₂F₆ Gas Used in Semiconductor Manufacturing

Abstract:

This research proposes an inspection policy aiming to improve the application of C₂F₆ in semiconductor manufacturing. For the gas product C₂F₆, total inspection is commonly employed by the producers before it is sent to downstream manufacturers. The study develops a Bayesian rectifying inspection sampling model with the objective of minimizing expected total cost from the producers standpoint. The factors that influence the total cost include gas product quality, inspection cost, sampling information, product failure cost, inspection accuracy, and decision on the remaining units. Influence diagram is used to represent the problem and derive the total objective function. The application of the model is presented via a real world company using the last four years of data. The proposed inspection policy yields an average of 15% cost savings using a cost reduction estimation method based on hyper-geometric distribution.

• Periodical: Applied Mechanics and Materials (Volume 389)
• Pages: 175-182
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.389.175
• Online since: August 2013
• Authors: I Ping Huang, Chiuh Cheng Chyu
• Keywords: Bayesian Decision Analysis, C₂F₆ Manufacturing, Influence Diagrams, Inspection Policy

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