Fabrication and Evaluation of Flowmeter with Focused-Ion-Beam System

Abstract:

In this paper, we fabricated and evaluated the piezoresistive type flowmeter with focused-ion-beam (FIB) system. The flowmeter body is made up of the low stress silicon nitride, and the nanometer sized piezoresistive layer is deposited with FIB system for the smaller measuring area. The flowmeter is evaluated in the wind tunnel, and the 0~4m/s air flows are applied. Although the sensitivity, ΔR/R shows the negative behavior unlike the conventional piezoresistive layer due to the added materials during the FIB process, the measurement results show the ΔR/R has a suitable sensitivity (-1.04E-2/ms-1) and a rapid response time (0.8sec). Those results represent the fabricated piezoresistive type air flowmeter has the possibility for the small area detection.

• Periodical: Applied Mechanics and Materials (Volume 389)
• Pages: 324-329
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.389.324
• Online since: August 2013
• Authors: Dae Keun Choi, Sang Hoon Lee
• Keywords: Flowmeter, Focused-Ion-Beam (FIB) System, MEMS, Piezoresistive

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