Experimental Analysis of Laser Scattering Patterns for the Surface Inspection of Crystalline Wafers in Solar Cell

Abstract:

The surface inspection of crystalline silicon wafers is of importance in manufacturing processes for solar cells. In this paper, The laser scattering mechanism is designed and manufactured through detailed investigations of the light scattering characteristics. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. As a result of the experimental analysis of laser scattering patterns, two pieces of evidence that are effective for the detection of micro defects are extracted. It is confirmed that the two features are regarded as important information for the detection of defects in crystalline silicon wafers. The usefulness of the designed mechanism and of extracted features is verified through experimental results.

• Periodical: Applied Mechanics and Materials (Volume 404)
• Pages: 560-565
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.404.560
• Online since: September 2013
• Authors: Gyung Bum Kim
• Keywords: Crystalline Silicon Wafer, Laser Scattering Pattern, Solar Cell

References

[1] Byelyayev, A., Stress diagnostics and crack detection in full-size silicon wafers using resonance ultrasonic vibrations, Department of Electrical Engineering, Ph.D. Dissertation., University of South Florida, (2005).

[2] Al-kindi, G. A., Shrinzadeh, B., Feasibility assessment of vision-based surface roughness parameter acquisition for different types of machined specimens, Image and Vision Computing, (2009), p.444 – 458.

DOI: 10.1016/j.imavis.2008.06.011

[3] Nayar, S. K., Ikeuchi, K., Kanade, T., Surface reflection: physical and geometrical perspectives, " IEEE Transaction on Pattern Analysis and Machine Intelligence, Vol. 13, No. 7, (1991. ), pp.611-634.

DOI: 10.1109/34.85654

[4] Kim, G. B., A structured mechanism development and experimental parameter selection of laser scattering for the surface inspection of flat-panel glasses, International Journal of Production Research, Vol. 48, Issue. 13, (2010), pp.3911-3923.

DOI: 10.1080/00207540902922844

[5] Beckmann, P., Spizzichino, A., The scattering of electromagnetic waves from rough surface, Pergamon Press, (1963).

[6] Gonzalez, R. C. and Woods, R. E., Digital image processing, Prentice hall, (2008).