Piezoelectric Bulk Material for the Fabrication of Membrane Actuators Using Surface Electrodes for Actuation

Sandy Zaehringer; Maximilian Spornraft; Norbert Schwesinger

doi:10.4028/www.scientific.net/AMM.404.682

Paper Titles

Task-Oriented Servo Loops Control of a 6-DOF Manipulator for Rescue Robot
p.663

A Novel and Efficient Method for Digital Printing
p.668

Induced Power Aggregation Operators and their Applications in Group Decision Making
p.672

Design and Implementation of Control System in Warm Extrusion Forming Process Manipulator for Steel Connecting Sleeve
p.678

Piezoelectric Bulk Material for the Fabrication of Membrane Actuators Using Surface Electrodes for Actuation
p.682

On Reliability Study of a New Generation of Crane Controllers
p.688

Development of Robotic System for Free-Form Surfaces Polishing Based on CAM Data
p.694

Adaptive Control for NC Position Table Base on Radical Basis Function Neural Network
p.699

Intelligent Remote Medical Care System by Use of a Multiple of Network Protocol Integration
p.707

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 404Piezoelectric Bulk Material for the Fabrication of...

Piezoelectric Bulk Material for the Fabrication of Membrane Actuators Using Surface Electrodes for Actuation

Abstract:

Using piezoelectric bulk material for manufacturing membrane actuators offers several advantages. Instead of manufacturing e.g. a silicon membrane and then either depositing a piezoelectric thinfilm actuator or mounting a piezo disc or stack to the silicon membrane, it is possible to use the piezoelectric material itself as membrane. Circular lead zirconate titanate (PZT) discs were adapted to silicon surface micromachining technologies. By depositing interdigitated electrode layouts several actuators were structured on one substrate. Those inderdigitated electrode layouts, when actuated, cause an inhomogeneous electric field distribution and thus cause an inhomogeneous mechanical stress distribution within the PZT-substrate. This forces the PZT to deflect in those actuated areas, without the usually needed passive membrane.

You might also be interested in these eBooks

Engineering Decisions for Manufacturing Systems

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volume 404)

Pages:

682-687

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.404.682

Citation:

Cite this paper

Online since:

September 2013

Authors:

Sandy Zaehringer, Maximilian Spornraft, Norbert Schwesinger

Keywords:

IDT, Piezoelectric Bulk Material, Piezoelectric Membrane Actuator, PZT, Surface Electrodes

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] S. Zähringer, N. Schwesinger: What happens turning a 250µm thin Piezo-stack sideways?, Microsystem Technologies, Berlin, Springer-Verlag, (2010).

DOI: 10.1007/s00542-010-1053-5

Google Scholar

[2] E. Hong, S. Trolier-McKinstry, R. L. Smith, S. V. Krishnaswamy, C. B. Freidhoff: Design of MEMS PZT Circular Diaphragm Actuators to Generate Large Deflections, Journal of Microelectromecenical Systems, Volume 15, No. 4, pp.832-839, (2006).

DOI: 10.1109/jmems.2006.879122

Google Scholar

[3] Enrico Bischur: Optimierung der Elektrodenstruktur und Herstellung eines neuartigen Mikroantriebs, Master Thesis, Technische Universität Muenchen, (2009).

Google Scholar