A Novel Micro-Hotplate Designed for Micro-Gas Sensor

Ji Li; Xiao Bo Zhang; Li Liu

doi:10.4028/www.scientific.net/AMM.411-414.1569

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 411-414A Novel Micro-Hotplate Designed for Micro-Gas...

A Novel Micro-Hotplate Designed for Micro-Gas Sensor

Abstract:

A original design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO₂, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 250 μm, respectively. The new micro-hotplate is beneficial to improving the sensor sensitivity.

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Periodical:

Applied Mechanics and Materials (Volumes 411-414)

Pages:

1569-1572

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.411-414.1569

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Online since:

September 2013

Authors:

Ji Li, Xiao Bo Zhang, Li Liu

Keywords:

Finite Element Analysis (FEA), Micro-Hotplate, Temperature Distributing

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