Fabrication of Deep Tapered Perforation Using a Modified through-Mask Electrochemical Micromachining

Abstract:

Through-mask electrochemical micromachining (Through-mask EMM) has been being employed to fabricate hole array on metal plate for its some unique merits. A modified double-sided through-mask EMM, in which a composite mask containing inert metal mask and insulation mask with an acute wall angle on the one side, and only insulation mask having an acute wall angle on the other side are used, was proposed to fabricate deep tapered perforations in the thick stainless steel in this paper. The evolving of hole contour was analyzed numerically and some mask artwork parameters were chosen optimally. Experimental results further verified the feasibility to shaped deep tapered perforation.

• Periodical: Applied Mechanics and Materials (Volumes 423-426)
• Pages: 1948-1954
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.423-426.1948
• Online since: September 2013
• Authors: Ping Mei Ming, Zhen Bin Lv, Xiao Hui Bao, Shu Qing Wang, Si Qi Liu
• Keywords: Double-Sided Masks, Finite Element (FE) Simulation, Inert Metal Mask, Tapered Perforation, Through-Mask Electrochemical Micromachining

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