Optimization of a Novel Micro-Hotplate for Gas Sensor

Chang Chun Li; Xiao Bo Zhang; Li Liu

doi:10.4028/www.scientific.net/AMM.423-426.2317

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 423-426Optimization of a Novel Micro-Hotplate for Gas...

Optimization of a Novel Micro-Hotplate for Gas Sensor

Abstract:

A novel design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO₂, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 230 μm, respectively. The new micro-hotplate is benefit for the improvement of sensor sensitivity.

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Periodical:

Applied Mechanics and Materials (Volumes 423-426)

Pages:

2317-2320

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.423-426.2317

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Online since:

September 2013

Authors:

Chang Chun Li, Xiao Bo Zhang, Li Liu

Keywords:

Finite Element Analysis (FEA), Magnetic Field Distribution, MEMS, Micro-Hotplate, Temperature Distributing

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