Investigation on Mechanical Properties of 6H-SiC Crystal

Abstract:

In this work, the mechanical properties, such as Vickers microhardness H_v, fracture toughness K_c, yield strength σ_v and brittleness index B_i, of <0001> oriented 6H-SiC crystal are systematically evaluated using a microindentation technique under 0.1-2 kg applied load. It is found the H_v is decreased as the applied load is increased which is mainly attributed to the effect of indenter penetration. The H_v value can be effectively presumed by Kicks law and the Meyers index n is determined to be 1.73. However, the K_c value is measured nearly a constant (~0.148 MPa.m^1/2) which reveals the toughness of 6H-SiC₍₀₀₀₁₎ crystal is much weaker than those of Si₍₁₀₀₎ and GaAs₍₁₀₀₎ crystals. The variation of σ_v to the load is similar to that of H_v. The brittleness index B_i also exhibits deceasing tendency as the applied load is added.

• Periodical: Applied Mechanics and Materials (Volumes 423-426)
• Pages: 251-257
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.423-426.251
• Online since: September 2013
• Authors: Min Jin, Jia Yue Xu, Yao Qing Chu, Yong Zheng Fang, Hui Shen, Guo Jian Jiang, Zhan Yong Wang
• Keywords: 6H-SiC Crystal, Brittleness, Fracture Toughness, Vickers Microhardness, Yield Strength

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