Piezoresistivity of Polymer-Derived AlSiCN Ceramics

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Abstract:

The conductivity of amorphous AlSiCN ceramics derived from polymer pyrolysis were investigated under applying stress. A huge gauge factor was observed, just as that of SiCN ceramics with a proper thermal initiator, and their piezoresistivity are a strong sensitive to stress applied. The high piezoresistivity effect and sensitivity to stress are due to compositional and mechanical properties of polymer derived AlSiCN ceramics.

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89-92

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September 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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