Fabrication of a Carbon Nanotube Gas Sensor Microelectrodes and its Application for Ammonia Detection

Abstract:

With the increasing needs for high-performance gas sensors in industrial production, environmental monitoring and so on, the research on gas sensors is becoming more and more important. In this paper, the electric field intensity distribution simulation process of the interdigital microelectrodes (IMEs) is discussed in details to get the proper electrode structural parameters. The IMEs on the ITO surface with a minimum gap of about 4μm are achieved by lithography, which provides a reliable, low-cost manufacturing method. Sensitive components are made of the multi-walled carbon nanotubes modified materials. The gas-sensing property of the sensor is detected for ammonia. The experiment result shows that the performance of the nanomodified sensor is obviously improved.

• Periodical: Applied Mechanics and Materials (Volume 431)
• Pages: 306-311
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.431.306
• Online since: October 2013
• Authors: Xiang Tao Ran*, Zhi Wang, Li Yang
• Keywords: Carbon Nanotube (CN), Gas Sensor, Interdigital Microelectrodes (IMEs), Lithography

References

[1] Amadou L. Ndiaye, Christelle Varenne, Pierre Bonnet: Elaboration of single wall carbon nanotubes-based gas sensors: Evaluating the bundling effect on the sensor performance, Thin Solid Films (2012), 520: 4465-4469.

DOI: 10.1016/j.tsf.2012.02.071

[2] J. A. Robinson, E.S. Snow, F.K. Perkins: Improved chemical detection using single-walled carbon nanotube network capacitors, Sensors and Actuators A(2007), 135: 309-314.

DOI: 10.1016/j.sna.2006.07.027

[3] [Youngmin Parka, Ki-Young Donga, Jinwoo Lee, Jinnil Choia: Development of an ozone gas sensor using single-walled carbon nanotubes, Sensors and Actuators B: Chemical(2009), 140: 407-411.

DOI: 10.1016/j.snb.2009.04.055

[4] Hongjun Jing, Yadong Jiang, Xiaosong Du: Dimethyl methylphosphonate detection with a single-walled carbon nanotube capacitive sensor fabricated by airbrush technique, J Mater Sci: Mater Electron(2013), 24: 667-673.

DOI: 10.1007/s10854-012-0789-3

[5] R. G. Compton, Neus Godino, Xavier Borrise et al: Mass Transport to Nanoelectrode Arrays and Limitations of the Diffusion Domain Approach : Theory and Experiment. J. Phys. Chem. C(2009), 113: 11119-11125.

DOI: 10.1021/jp9031354

[6] Dajing Chen, Sheng Lei, Renhui Wang: Dielectrophoresis Carbon Nanotube and Conductive Polyaniline Nanofiber NH3 Gas Sensor. Chinese Journal of Analytical Chemistry(2012), 40: 145-149.

DOI: 10.1016/s1872-2040(11)60524-0

[7] Ting Zhang, Syed Mubeen, Nosang V Myung et al: Recent Progress in Carbon Nanotube-based Gas Sensors. Nanotechnology(2008), 19: 1-15.

DOI: 10.1088/0957-4484/19/33/332001

[8] Xiaofei Yan, Maohua Wang et al: Progress of interdigitated array microelectrodes based impedance immunosensor. CHINESE J ANAL CHEM(2011), 10: 1601-1610.

DOI: 10.3724/sp.j.1096.2011.01601

[9] Douglas R. Kauffman, Alexander Star et al: Carbon Nanotube Gas and Vapor Sensors. Angew. Chem. Int. Ed(2008), 47: 6550-6570.

DOI: 10.1002/anie.200704488

[10] Y. M. Wong, W. P. Kang, J. L. Davidson et al: A novel microelectronic gas sensor utilizing carbon nanotubes for hydrogen gas detection. Sens. Actuators B(2003), 93: 327-332.

DOI: 10.1016/s0925-4005(03)00213-2

[11] A. R. Mohd Syaifudina, K. P. Jayasunderab, S. C. Mukhopadhyaya: A low cost novel sensing system for detection of dangerous marine biotoxins in seafood. Sensors and Actuators B, 137: 67-75.

DOI: 10.1016/j.snb.2008.12.053

[12] U. Frey, U. Egert, F. Heer et al: Microelectronic system for high-resolution mapping of extracellular electric fields applied to brain slices. Biosensors and Bioelectronics(2009), 24: 2191-2198.

DOI: 10.1016/j.bios.2008.11.028

[13] Bhavin B. Parekh, Giovanni Fanchini, Goki Eda et al: Improved conductivity of transparent single- wall carbon nanotube thin films via stable post deposition functionalization. Appl. Phys. Lett(2007), 90: 1-3.

DOI: 10.1063/1.2715027

[14] Wei Zhang, Shao Xie, Mei Li et al: Electrochemical characteristics of an interdigitated microband electrode array of boron-doped diamond film. Collect. Czech. Chem. Commun(2009), 74: 393-407.

DOI: 10.1135/cccc2008161

[15] T. Ueda, S. Katsuki, K. Takahashi, et al: Fabrication and characterization of carbon nanotube based high sensitive gas sensors operable at room temperature. Diamond & Related Materials(2008), 17: 1586-1589.

DOI: 10.1016/j.diamond.2008.03.009

[16] Ramin Banan Sadeghian, Mojtaba Kahrizi: A novel miniature gas ionization sensor based on freestanding gold nanowires. Sensors and Actuators A(2007), 137: 248-255.

DOI: 10.1016/j.sna.2007.03.010

[17] G. U. Sumanasekera, L. Grigorian, K. A. Williams et al: Reversible Intercalation of Charged Iodine Chains into Carbon Nanotube Ropes. Phys. Rev. Lett(1998), 80(25): 5560-5563.

DOI: 10.1103/physrevlett.80.5560

[18] G. V. Kamarchuk, Igor G. Kolobov, Andrei V. Khotkevich et al: New chemical sensors based on point hetero contact between single wall carbon nanotubes and wires. Sens. Actuators B: Chem(2008), 134: 1022-1026.

DOI: 10.1016/j.snb.2008.07.012