Calibrating the Precision of a Contact Sensor for Displacement with a Piezo Nanopositioning Stage

Guang Feng Shi; Wei Xao; Guo Quan Shi

doi:10.4028/www.scientific.net/AMM.433-435.221

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 433-435Calibrating the Precision of a Contact Sensor for...

Calibrating the Precision of a Contact Sensor for Displacement with a Piezo Nanopositioning Stage

Abstract:

A calibration method of a contact sensor for displacement with a piezo nanopositioning stage is presented in this paper. The experiment system is set up, and an old contact sensor for displacement is calibrated by a P-622.ZCD precision vertical nanopositioning stage, which is tested for a good using status in the end. The calibrating results indicate the error regularity existed in the output values, and there is the stagnation phenomenon during the descending process of the stage after elevation.

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Periodical:

Applied Mechanics and Materials (Volumes 433-435)

Pages:

221-224

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.433-435.221

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Online since:

October 2013

Authors:

Guang Feng Shi*, Wei Xao, Guo Quan Shi

Keywords:

Calibrating, Contact Sensor Fordisplacement, Linearrelationship, Piezo Nanopositioning Stage, Stagnation

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