Nonlinear Analysis of Actuation Performance of NiTi/Si Composite Film

Article Preview

Abstract:

The NiTi shape memory alloy (SMA) composite film with Si substrate subjected to thermal loads was modeled by the method of mechanics of materials. The governing equation was obtained by combining static equilibrium equations, geometric and physical equations. Both the material nonlinearity of SMA and the geometric nonlinearity of bending deformation of SMA composite film were considered. By simulating the actuation performance of the SMA composite film during a cooling-heating thermal cycle, it is found that the final cooling temperature and the thickness of SMA film have significant effects on the actuation performance of the SMA composite film. Besides, the maximum deflection of the SMA composite film is affected obviously by the geometric nonlinearity of bending deformation when the thickness of SMA film is very large.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

572-576

Citation:

Online since:

October 2013

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] Y. Q. Fu, H. J. Du, W. M. Huang, S. Zhang, M. Hu, TiNi-based thin films in MEMS applications: a review. Sensors and Actuators A112 (2004) 395-408.

DOI: 10.1016/j.sna.2004.02.019

Google Scholar

[2] L. Wang, Theory and techniques of thin film shape memory alloy microactuators based on silicon substrate, Ph. D thesis, Shanghai Jiaotong University, (2000).

Google Scholar

[3] X. L. Cheng, Optimization research of dynamic actuating characteristics of TiNi(Cu)/Si composite diaphragm based on MEMS technology, Ph. D thesis, Shanghai Jiaotong University, (2002).

Google Scholar

[4] Y. P. Wang, Y. B. Wu, X. B. Zhang, C. C. Zhang, C. S. Yang, Simulation and fabrication of an SMA electro-thermal actuator with Si/ TiNi bimorph structure. Micronanoelectronic Technology, 47 (2) (2010) 93-98.

Google Scholar

[5] S. S. Sun, J. Dong, Modeling and simulation on the actuation performance of shape memory alloy/Si composite diaphragm, Journal of Shanghai Jiaotong University 44(8) (2010) 1145-1149.

Google Scholar

[6] C. Liang, C. A. Rogers, One-dimensional thermo-mechanical constitutive relations for shape memory materials, Journal of Intelligent Material Systems and Structures 8 (4) (1997) 285-302.

DOI: 10.1177/1045389x9700800402

Google Scholar