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The Electricity Design of Pressure Sensor
Abstract:
The relative discussion and research of Micro-Electro-Mechanical System (MEMS) and pressure sensor is carried out in this paper. The working principle of pressure sensor is analyzed, and the cantilever piezoresistive pressure sensor is studied in details. The electricity design of pressure sensor is researched. The open loop Wheatstone-bridge design is adopted in this paper, which adds the freedom of disposing circuit.
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539-542
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Online since:
October 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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