The Electricity Design of Pressure Sensor

Article Preview

Abstract:

The relative discussion and research of Micro-Electro-Mechanical System (MEMS) and pressure sensor is carried out in this paper. The working principle of pressure sensor is analyzed, and the cantilever piezoresistive pressure sensor is studied in details. The electricity design of pressure sensor is researched. The open loop Wheatstone-bridge design is adopted in this paper, which adds the freedom of disposing circuit.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

539-542

Citation:

Online since:

October 2013

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2013 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] D. Wang, C. Wang, G. Hu, The overview of MEMS technology, Machinery Design & Manufacture, 3 (2006) 106-108.

Google Scholar

[2] X. Li, The development and application status of MEMS, Transducer and Microsystem Technologies, Vol 25, 5 (2006) 7-9.

Google Scholar

[3] S. Lucyszyn, Review of radio frequency micro-electro-mechanical systems technology, IEEE Proc. -Sci. Meas. Technol, 151 (2004) 93-103.

Google Scholar

[4] Amy C. Richards Grayson, Rebecca S. Shawgo, Audrey M. Johnson, et al, A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices, in: Proceedings of IEEE, 92 (2004) 6-21.

DOI: 10.1109/jproc.2003.820534

Google Scholar

[5] G. Liu, The New Sensor Techlonogy and Application, Beijing University of Aeronautics and Astronautics Press, Beijing, (1995).

Google Scholar