Research on the Material Transportation Automation Technology Based on SEMI Standard

Abstract:

Using SEMI standards to provide the communication interface and communication information between the semiconductor device and the factory host, in order to improve the yield and quality of semiconductor products has been a general consensus. In this paper, through the analysis of the related standard about the material transport in SEMI, and the specific introduction of the actual device model of the semiconductor equipment, describes the process of material transportation factory automation technology and the application in the actual equipment.

• Periodical: Applied Mechanics and Materials (Volume 441)
• Pages: 883-886
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.441.883
• Online since: December 2013
• Authors: Chen Xi Wang, Ming Zhe Liu, Ai Dong Xu
• Keywords: FA, Material Transportation, SEMI Standard, Semiconductor

References

[1] Jun-Yan Deng, Fan-Tien Cheng, Nguyen. K. Development of an Object-based equipment controller for semiconductor equipment communications[C]. Industrial Electronics Society, IECON 99 Proceedings. The 25th Annual Conference of the IEEE. 1999, 3: 1240_1245.

DOI: 10.1109/iecon.1999.819389

[2] Mingzhe Liu, Aidong Xu, Haibin Yu. Research on SEMI standard model device control semiconductor, Chinese Journal of scientific instrument (fourth suppl. ) 2008, 4. In Chinsese.

[3] Jiafa Ye, Mingzhe Liu. Research of Interface A communication method for semiconductor equipment, mechanical design and manufacture of 2012, 5. In Chinese.

[4] Wei Wang, Longqing Zou, hua Xu. Design of semiconductor process equipment simulation system based on SEMI standard, electronic information materials and devices 2012, 4. In Chinese.