Overview of Micro-Force Sensing Methods

Abstract:

At present, reliable micro-force sensing is one of the most important research for micromanipulation and micro-assembly. Six kinds of methods to detect micro-force are described in this paper. Analysis of the basic principle and detection accuracy of each sensing method, and applications in micro-assembly and micromanipulation are briefly introduced. The purpose of this paper is to be useful to provide some references for scholars engaging in the micro-force sensing, which in turn promotes automatic processing level of micro-assembly and micromanipulation to reliably manufacture micro devices of high quality.

• Periodical: Applied Mechanics and Materials (Volumes 462-463)
• Pages: 25-31
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.462-463.25
• Online since: November 2013
• Authors: Chao Zhe Ma, Jin Song Du, Yi Yang Liu*, Yun Kai Chu
• Keywords: Micro Force Sensing, Micro-Assembly, Micromanipulation

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