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Research of Influence Thickness of Nanocrystalline VOx Films on their Electrical Properties

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Abstract:

Nanocrystalline VOx thin films were manufactured by using pulsed laser deposition. The influence of deposition time on electrical parameters of VOx thin films were researched. It was determined that changes in deposition time lead to significant changes in properties of thin films, including resistivity in the range from 5 Ohm·cm to 70 Ohm·cm. The possibility of controlling physical properties of VOx nanocrystalline films obtained in the experiments has been shown.

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Periodical:

Applied Mechanics and Materials (Volumes 475-476)

Pages:

1266-1269

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.475-476.1266

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Cite this paper

Online since:

December 2013

Authors:

Oleg Alekseevich Ageev, Evgeny Yurievich Gusev*, Evgeny Gennad’evich Zamburg, Alexsander Valer’evich Michailichenko, Vladislav Anatolyevich Gamaleev, Vladislav Vladimirovich Tkachuk

Keywords:

Nanocrystalline Thin Films, Nanomaterial, Nanotechnology, Pulsed Laser Deposition, VOx

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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