Design Optimization of Low Power and Low Frequency Vibration Based MEMS Energy Harvester

Hasnizah Aris; David Fitrio; Jack Singh

doi:10.4028/www.scientific.net/AMM.475-476.1624

Paper Titles

Experimental Investigations on the Relationship between the Capacitor Capacity and the Performance of the Passive Dynamic Filter
p.1607

A Controller of Motor Discrete Variable Frequency Soft Starting and Harmonic Filtering
p.1611

Modeling and Simulation of Passive Dynamic Harmonic Filter Based on IGBT
p.1615

Research and Design of Panoramic Parking System Based on DaVinci Technology
p.1619

Design Optimization of Low Power and Low Frequency Vibration Based MEMS Energy Harvester
p.1624

A Digital Compensation Device Based on Multiplying Digital-to-Analog Converter
p.1629

Low Distortion Analog Front-End for Digital Electret Microphone
p.1633

Design of a AC Current Source for Inductive Loads
p.1638

Iterative Solution of Nonlinear Dynamical System of an Electrostatically Actuated Micro-Cantilever
p.1643

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 475-476Design Optimization of Low Power and Low Frequency...

Design Optimization of Low Power and Low Frequency Vibration Based MEMS Energy Harvester

Abstract:

The development and utilization of different structural materials, optimization of the cantilever geometry and power harvesting circuit are the most commonly methods used to increase the power density of MEMS energy harvester. This paper discusses the cantilever geometry optimization process of low power and low frequency of bimorph MEMS energy harvester. Three piezoelectric materials, ZnO, AlN and PZT are deposited on top and bottom of the cantilever Si substrate. This study focuses on the optimization of the cantilevers length, width, substrate thickness and PZe thickness in order to achieve lower than 600 Hz of resonant frequency. The harvested power for this work is in the range of 0.02 ~ 194.49 nW.

You might also be interested in these eBooks

Sensors, Measurement and Intelligent Materials II

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 475-476)

Pages:

1624-1628

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.475-476.1624

Citation:

Cite this paper

Online since:

December 2013

Authors:

Hasnizah Aris, David Fitrio, Jack Singh

Keywords:

Energy Harvester, Low Frequency, Low Power, Piezoelectric

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] J. -Q. Liu, H. -B. Fang, Z. -Y. Xu, X. -H. Mao, X. -C. Shen, D. Chen, H. Liao, and B. -C. Cai, A MEMS-based piezoelectric power generator array for vibration energy harvesting, Microelectronics Journal, vol. 39, pp.802-806 (2008).

DOI: 10.1016/j.mejo.2007.12.017

Google Scholar

[2] C. Lee, Y. M. Lim, B. Yang, R. K. Kotlanka, C. -H. Heng, J. H. He, M. Tang, J. Xie, and H. Feng, Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect, Sensors and Actuators A: Physical, vol. 156, pp.208-216 (2009).

DOI: 10.1016/j.sna.2009.02.024

Google Scholar

[3] J. Schaufuss, D. Scheibner, and J. Mehner, New approach of frequency tuning for kinetic energy harvesters, Sensors and Actuators A: Physical, vol. 171, pp.352-360 (2011).

DOI: 10.1016/j.sna.2011.07.022

Google Scholar

[4] C. Liu, Foundations of MEMS: Prentice Hall Press (2011).

Google Scholar

[5] S. Roundy, P. K. Wright, and J. Rabaey, A study of low level vibrations as a power source for wireless sensor nodes, Computer Communications, vol. 26, pp.1131-1144 (2003).

DOI: 10.1016/s0140-3664(02)00248-7

Google Scholar

[6] Y. C. Shu and I. C. Lien, Efficiency of energy conversion for a piezoelectric power harvesting system, Journal of Micromechanics and Microengineering, vol. 16, p.2429 (2006).

DOI: 10.1088/0960-1317/16/11/026

Google Scholar