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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 52-54Effect of Target Power on Structure and Mechanical...

Effect of Target Power on Structure and Mechanical Properties of Nanocrystalline ZrN Coatings

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Abstract:

Nanocrystallized ZrN coatings have been deposited by DC magnetron sputtering. The effects of target power on the microstructure and mechanical properties of ZrN coatings have been investigated. X-ray diffraction, scanning electron microscope and nano-indentation were applied to characterize the phase structure, morphologies of cross-section and mechanical properties of ZrN coatings. As power increases up to 250 W, ZrN coating exhibits (111) preferred orientation. All coatings showed columnar structure, and the columnar width increased with improved power. These microstructural changes resulted in the increase in hardness with increasing target power.

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Advances in Mechanical Engineering (ICME)

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Periodical:

Applied Mechanics and Materials (Volumes 52-54)

Pages:

1762-1765

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.52-54.1762

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Online since:

March 2011

Authors:

Fang Ping Zhu, Zheng Bing Qi, Zhou Cheng Wang, Chong Hu Wu

Keywords:

Magnetron Sputtering, Mechanical Property, Target Power, ZrN

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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