Stability Research of Laser Confocal Probe for Measuring the Micro-Shpere

Abstract:

Laser confocal probe, on an active focus adjusting principle, was introduced in this paper. This kind of non-contact laser probe has the abilities to do the detection on strong reflection of the surface of high precision metal parts and optical devices. So, a problem of shape inspection detection was resolved. The micro-sphere is the key element in the ICF (short for inertial confinement fusion) system. The success or failure of "Ignition" is directly related to the accuracy of the assembly location of micro-sphere in the micro-target. Because of the particularity of the micro-sphere, laser confocal probe is used to do the detection of the center error of micro-sphere. The required measurement precision is less than 3µm. The mathematical formula between the height defference or the displacement value of measured surface and the displacement valued of the tuning fork can be gotten by the time different principle. Good stability of frequency and the swing of tuning fork, which approved through the experiments, have little influence to the time different Δt and the final measurement results.

• Periodical: Applied Mechanics and Materials (Volumes 52-54)
• Pages: 818-823
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.52-54.818
• Online since: March 2011
• Authors: Ting Wang, Yu Zhu, Kai Ming Yang
• Keywords: Laser Confocal Probe, Micro-Target, Non-Contact Measurement, Stability

References

[1] K K Mishra, R K Khardekar, Radhmi Singh and H C Pant 2002, Fabrication of polystyrene hollow microspheres as laser fusion targets by optimized density-matched emulsion technique and characterization (Journal of Physics vol 59) ed H R Krishnamurthy (Bangalore: India) p.113.

DOI: 10.1007/s12043-002-0036-1

[2] Li Jun, Sun Tao, Li Dan, 2003. 9, Adsorption force calculation for vacuum adsorption of target Pellet, VACUUM, issue 5, p.24~27.

[3] Chen Guoliang Huang Xinhan，Research on Vacuum Micro-Gripper of Intelligent Micromanipulation Robots，Proceedings of the 2004 IEEE International Conference on Robotics and Biomimetics，2004，p.279~283.

DOI: 10.1109/robio.2004.1521790

[4] J. G. LINHART，The Use of Bubbles for Plasma Liners in ICF Experiments， IEEE TRANSACTIONS ON PLASMA SCIENCE, 1988, 16(4): 438~443.

DOI: 10.1109/27.3857

[5] Didier Marsacq，Bruno Dufour，Benoit Blondel，High-performance aromatic polyimides for inertial confinement fusion experiments，Polymer International, 2000, 49: 1021~1023.

DOI: 10.1002/1097-0126(200009)49:9<1021::aid-pi522>3.0.co;2-d

[6] Yamazaki, A., Aoyama, H., Lee, K.S. and Sawabe, M. 1993 Non-contact Probe for Continuous Measurement of Surface Inclination and Position Using Dynamic Irradiation of the Light Beam (France: Annals of the CIRP vol 42) p.586~588.

DOI: 10.1016/s0007-8506(07)62515-3

[7] Zhang G.X., et al 2001, A System for Measuring High-Reflective Sculptured Surfaces Using Optical Non-contact Probe (France: Annals of the CIRP vol 50) p.369~372.

DOI: 10.1016/s0007-8506(07)62142-8

[8] Jordan H.J. and Tiziani H. 1998, High Accurate Characterization of Engineering Surfaces Using Confocal Microscopy (UK: Measurement Science and Technology vol 9) ed P Hauptmann (Bristol: UK) p.1142~51.

DOI: 10.1088/0957-0233/9/7/023

[9] Tiziani H.J., et al 1994, Three-dimensional Analysis by a Microlens Array Confocal Arrangement (USA: Applied Optics vol 33) p.567~572.

DOI: 10.1364/ao.33.000567

[10] Wilson T. 1990, Confocal Microscopy (London: Academic Press).

[11] Gao X. 2002, A Study on the Optical Noncontact probe for Surface Measurement (Tianjin: PhD dissertation) p.33~40.