[1]
S. Miura, H. Honma, Advanced copper electroplating for application of electronics, J. Sci. Surface and Coatings Technology. 169 –170 (2003) 91–95.
DOI: 10.1016/s0257-8972(03)00165-8
Google Scholar
[2]
X.Q. Xu, L.Q. Zhu, W.P. Li, H.C. Liu, A variable hydrophobic surface improves corrosion resistance of electroplating copper coating, J. Sci. Applied Surface Science. 257 (2011) 5524–5528.
DOI: 10.1016/j.apsusc.2011.01.015
Google Scholar
[3]
C.H. Chen, C.W. Lu, S.M. Huang, W.P. Dow, Effects of supporting electrolytes on copper electroplating for filling through-hole, J. Sci. Electrochimica Acta. 56 (2011) 5954– 5960.
DOI: 10.1016/j.electacta.2011.04.109
Google Scholar
[4]
Tso-Fu M. Chang, T. Shimizu, C. Ishiyama, M. Sone, Effects of pressure on electroplating of copper using supercritical carbon dioxide emulsified electrolyte, J. Sci. Thin Solid Films. 529 (2013) 25–28.
DOI: 10.1016/j.tsf.2012.05.058
Google Scholar
[5]
Z. Abdel Hamid, A. Abdel Aal, New environmentally friendly noncyanide alkaline electrolyte for copper electroplating, J. Sci. Surface and Coatings Technology. 203 (2009) 1360–1365.
DOI: 10.1016/j.surfcoat.2008.11.001
Google Scholar
[6]
S.Y. Chiu, Y.L. Wang, S.C. Chang, Application of plasma immersion ion implantation on seeding copper electroplating for multilevel interconnection, J. Sci. Thin Solid Films. 478 (2005) 293– 298.
DOI: 10.1016/j.tsf.2004.11.187
Google Scholar
[7]
K. Weiss, S. Riedel, S.E. Schulz, M. Schwerd, H. Helneder, H. Wendt, T. Gessne, Development of different copper seed layers with respect to the copper electroplating process, J. Sci. Microelectronic Engineering. 50 (2000) 433–440.
DOI: 10.1016/s0167-9317(99)00312-3
Google Scholar
[8]
S.S. Abd El Rehim, S.M. Sayyah, M.M. El Deeb, Electroplating of copper films on steel substrates from acidic gluconate baths, J. Sci. Applied Surface Science. 165(2000) 249–254.
DOI: 10.1016/s0169-4332(00)00015-5
Google Scholar