Research on Coating Devices with Applied Technology in Magnetron Sputtering Regulated Switching Power Supply Design

Zhi Wen Zhou; Cai Xia Wang; An Ren Ma

doi:10.4028/www.scientific.net/AMM.540.134

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 540Research on Coating Devices with Applied...

Research on Coating Devices with Applied Technology in Magnetron Sputtering Regulated Switching Power Supply Design

Abstract:

Magnetron power supply is one of the most important components in coating devices in applied technology. Magnetron regulated power supply with high power and high efficiency is studied and designed on the basis of high-frequency switching power supply technology. The principle of the main circuit and control circuit design are introduced. A MATLAB simulating model is composed to study parameters and waveforms of the designed circuits. The hardware circuit and software program are designed based on simulation results. The adjustment and display of the output voltage and the output current of the power supply under different work modes are achieved with TMS320F2812 DSP system. Practical applications confirm that the designed power supply has good constant current control effect, high reliability and working stability.

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Periodical:

Applied Mechanics and Materials (Volume 540)

Pages:

134-137

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.540.134

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Online since:

April 2014

Authors:

Zhi Wen Zhou, Cai Xia Wang*, An Ren Ma

Keywords:

DSP, Magnetron Sputtering, Switching Power Supply

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References

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