Fabrication and Properties of Patterned Nichrome Thin Film Using MEMs Technology

Jie Han; Ping Cheng; Cong Chun Zhang; Gui Fu Ding

doi:10.4028/www.scientific.net/AMM.543-547.1496

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 543-547Fabrication and Properties of Patterned Nichrome...

Fabrication and Properties of Patterned Nichrome Thin Film Using MEMs Technology

Abstract:

A patterned nichrome thin film used for strain gauge was prepared on the glass substrate using microelectromechanical system (MEMS) micromachining process. The nichrome sensitive element had a width of 10μm and a thickness of 0.3μm. The electrical properties of the nichrome film were investigated, and a stable TCR of 1.2×10^-4/°C was obtained.

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Periodical:

Applied Mechanics and Materials (Volumes 543-547)

Pages:

1496-1499

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.543-547.1496

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Online since:

March 2014

Authors:

Jie Han*, Ping Cheng, Cong Chun Zhang, Gui Fu Ding

Keywords:

MEMS, Nichrome, Thin Film

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