A MEMS-Based Ionization Gas Sensor with ZnO Nanorods Coated Distributed Micro-Discharge Structure

Abstract:

A kind of ionization gas sensor based on the polarization structure was designed and manufactured by MEMS technology. The gas sensor device consists of 3 main parts: the anode electrode, the cathode and the distributed polarization structure array which lie between the former two parts. All parts were coated with ZnO nanorods by a two-step hydrothermal method. Different concentration acetone gas was tested using the device. The results support that the ionization gas sensors exhibit reasonable sensitivity and good repeatability at the applied voltages lower than 4V.

• Periodical: Applied Mechanics and Materials (Volume 551)
• Pages: 460-465
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.551.460
• Online since: May 2014
• Authors: Mao Bo Fang, Xiao Lin Zhao, Jian Hua Li, Zi Wang, Yan Fang Wang, Zhong Yu Hou*
• Keywords: Ionization Gas Sensor, MEMS, Polarization Structure, ZnO Nanorods

References

[1] AshishModi, Nikhil Koratkar, Eric Lass, Miniaturized gas ionization sensors using carbon nanotubes, J . Nature. 424(2003): 171-174.

DOI: 10.1038/nature01777

[2] Hou Z, Cai B, Liu H, Mechanism of gas breakdown near Paschen's minimum in electrodes with one-dimensional nanostructures, J . Applied Physics Letters. 94(2009): 1635061.

DOI: 10.1063/1.3123170

[3] Liu H, Yadian B, Liu Q, A hybrid nanostructure array for gas sensing with ultralow field ionization voltage, J . Nanotechnology. 24(2013): 175301.

DOI: 10.1088/0957-4484/24/17/175301

[4] G. Hui, L. Wu, M. Pan, Y. Chen, A novel gas-ionization sensor based on aligned multi-walled carbon nanotubes, J . Measurement Science and Technology. 17(2006): 2799-2805.

DOI: 10.1088/0957-0233/17/10/034

[5] C. Zhan,Y. Pan, Zi. Wang, Ionization gas sensing mechanism of a hybrid nanostructure with carbon nanotubes and ZnO nanorods, J . Sensors and Actuators B: Chemical. 183(2013): 81-86.

DOI: 10.1016/j.snb.2013.03.098

[6] Hou Z, Cai B, Xu D, Ionization gas sensing of the ion flow current in a microtripolar electrode system with carbon nanotubes[J]. Applied Physics Letters. 92 (2008): 35051.

DOI: 10.1063/1.2938875

[7] Jiahao Wu, Hai Liu, Yanyan Wang, A MEMS-based ionization gas sensor using carbon nanotubes and dielectric barrier[C]Proceeding of the 3rd IEEE int. Conf. on Nano/ Micro Engineered and Molecular Systems . (2008).

DOI: 10.1109/nems.2008.4484451

[8] L Liao, H B Lu, M Shuai, A novel gas sensor based on field ionization from ZnO nanowires: moderate working voltage and high stability, J . Nanotechnology. 19 (2008): 175501.

DOI: 10.1088/0957-4484/19/17/175501

[9] Weiguang Yang, Farong Wan, Siwei Chen, Hydrothermal growth and application of ZnO nanowire films with ZnO and TiO2 buffer layers in dye-sensitized solar cells,J. Nanoscale Res Lett. 4(2009): 1486-1492.

DOI: 10.1007/s11671-009-9425-4

[10] P. G Han, H Wong,M. C Poon, Sensitivity and stability of porous polycrystalline silicon gas sense, J. Colloids and Surfaces A: Physicochemical and Engineering Aspects. 179(2001): 171-175.

DOI: 10.1016/s0927-7757(00)00653-1

[11] Zhongyu Hou, A study of one dimensional nano electrode based field induced ionization MEMS gas sensors, D. Shanghai Jiaotong University, 2008 (in chinese).