Laser Wave-Front Measuring Based on Quadri-Wave Lateral Shearing Interferometry

Juan Ren; Xiu Juan Luo; Ai Li Xia; Yu Zhang

doi:10.4028/www.scientific.net/AMM.568-570.50

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 568-570Laser Wave-Front Measuring Based on Quadri-Wave...

Laser Wave-Front Measuring Based on Quadri-Wave Lateral Shearing Interferometry

Abstract:

Quadri-wave lateral shearing interferometry (QWLSI) is a new and powerful technique for wave-front measurement. This paper deduced the principle of QWLSI in details, showed a Fourier analysis of the resulting interferogram, then obtained a wave-front with high accuracy and minimum reconstruction error by using the least square method. Finally a 532nm laser was measured to validate the reconstruction, and the error analysis was discussed in practical laser metrology. It is concluded that QWLSI provides a better choice for the adaptive optics as compared with traditional lateral shearing interferometer (TLSI) and Shack-Hartmann (S-H) wave-front sensor.

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Periodical:

Applied Mechanics and Materials (Volumes 568-570)

Pages:

50-54

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.568-570.50

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Online since:

June 2014

Authors:

Juan Ren, Xiu Juan Luo, Ai Li Xia, Yu Zhang

Keywords:

Adaptive Optics, Laser Metrology, Modified Hartmann Mask, Quadri-Wave Lateral Shearing Interferometry, Wave-Front Reconstruction

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