Design and Development of XY Micro-Positioning Stage Using Modified Topology Optimization Technique

Abstract:

XY positioning stages are fundamental components during precision manipulation of micro sized objects. A compliant mechanism based mechanism is the appropriate choice for the design of XY stage. Topology optimization techniques are utilized to design the compliant mechanism. During the process of topology optimization, senseless regions are appearing from the manufacturability perspective. Senseless regions are staircase boundaries and node to node connectivity which is impossible to manufacture. Interpolation function is included in the topology optimization to minimize the effect of senseless regions. However topologically developed design is post processed to attain the manufacturability. Structural performance of the post processed final design is validated through Finite Element Method (FEM) and experimental technique.

• Periodical: Applied Mechanics and Materials (Volumes 592-594)
• Pages: 2220-2224
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.592-594.2220
• Online since: July 2014
• Authors: T. Ramesh*, Ramalingam Bharanidaran, V. Gopal
• Keywords: Compliant Mechanism, Finite Element Method (FEM), Senseless Regions, Topology Optimization

References

[1] Y. Zhang, K. K. Tan, and S. Huang: Vision-servo system for automated cell injection, IEEE Trans. Ind. Electron., vol. 56 (2009), p.231–238.

DOI: 10.1109/tie.2008.925771

[2] A. Ramadan, T. Takubo, Y. Mae, K. Oohara, and T. Arai: Developmental process of a chopstick-like hybrid-structure two-fingered micromanipulator hand for 3-D manipulation of microscopic objects, IEEE Trans. Ind. Electron., vol. 56 (2009).

DOI: 10.1109/tie.2008.2008753

[3] T. J. Teo, I. -M. Chen, G. Yang, and W. Lin: A flexure-based electromagnetic linear actuator, " Nanotechnology, vol. 19 (2008), pp.315501-1–315501-10.

DOI: 10.1088/0957-4484/19/31/315501

[4] M. Rakotondrabe and I. A. Ivan, Development and force/position control of a newhybrid thermo-piezoelectric microgripper dedicated to micromanipulation tasks, IEEE Trans. Autom. Sci. Eng., vol. 8 (2011), p.18–28.

DOI: 10.1109/tase.2011.2157683

[5] Y. Yun and Y. Li: Modeling and control analysis of a 3-PUPU dual compliant parallel manipulator for micro positioning and active vibration isolation, Trans. ASME J. Dyn. Syst., Meas. Contr., vol. 134 (2012), p.021001.

DOI: 10.1115/1.4005036

[6] Solehuddin Shuib, M.I.Z. Ridzwan and A Halim Kadarman: Methodology of Compliant Mechanisms and its Current Developments in Applications: A Review, American Journal of Applied Sciences, vol. 4 (3) (2007), pp-160-167.

DOI: 10.3844/ajassp.2007.160.167

[7] R. Bharanidaran and Ramesh T. Numerical simulation and experimental investigation of a topologically optimized compliant microgripper, Sensors and Actuators A: Physical, Vol. 205 (2014), pp-156–163.

DOI: 10.1016/j.sna.2013.11.011

[8] O. Sigmund A 99 line topology optimization code written in Matlab Struct Multidisc Optim, vol. 21 (2001), 120–127.

DOI: 10.1007/s001580050176