Research on PVDF Micro-Force Sensor

Chao Zhe Ma; Jin Song Du; Yi Yang Liu

doi:10.4028/www.scientific.net/AMM.599-601.1135

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 599-601Research on PVDF Micro-Force Sensor

Research on PVDF Micro-Force Sensor

Abstract:

At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor’s output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution.

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Periodical:

Applied Mechanics and Materials (Volumes 599-601)

Pages:

1135-1138

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.599-601.1135

Citation:

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Online since:

August 2014

Authors:

Chao Zhe Ma*, Jin Song Du, Yi Yang Liu

Keywords:

Micro-Assembly, Micro-Force Sensing, Micromanipulation, PVDF, Sub-μN

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References

[1] Kalikow S., Seyfried J., Fahlbusch ST., Buerkle A. and Schmoeckel F., A flexible microrobot-based microassembly station, Journal of Intelligent and Robotic Systems, 27 (2000) 135-169.

DOI: 10.1023/a:1008106331459

Google Scholar

[2] Yiyang Liu, Yuechao Wang, Peng Yu and Zaili Dong, An Overview of Micro-force Sensing Methods in Micromanipulation and Microassembly, J. Chinese Journal of Scientific Instrument, 29(4) (2008) 155-158.

DOI: 10.1109/nems.2008.4484286

Google Scholar

[3] Zesch W. and Fearing R., Alignment of Micro parts Using Force Controlled Pushing, SPIE Conference on Microrobotics and Micromanipulation (1998).

DOI: 10.1117/12.325735

Google Scholar

[4] F. Arai, Y. Nonoda, T. Fukuda and T. Oota, New Force Measurement and Micro Grasping Method Using Laser Raman Spectrophotometer, Int. Conf. on Robotics and Automation, Minneapolis, USA, (1996) 2220-2225.

DOI: 10.1109/robot.1996.506494

Google Scholar

[5] Emmanuelle Algre, Zhuang Xiong, Marc Faucher, Benjamin Walter etc., MEMS Ring Resonators for Laserless AFM With Sub-nanoNewton Force Resolution, Journal of Microelectromechanical Systems, 21(2) (2012) 385-397.

DOI: 10.1109/jmems.2011.2179012

Google Scholar

[6] Chaozhe Ma, Jinsong Du, Yiyang Liu, Yunkai Chu, Overview of micro-force sensing methods, Applied Mechanics and Materials (2014) 25-31.

Google Scholar