Design of a Type of Lift Coating Machine

Abstract:

Designed a type of lift coating machine including its structure, hardware system and software system. The lift coating machine we design is a kind of wet coating equipment, which has some advantages such as lift speed, lift height, impregnate time, multilayer coating, continuous and adjustable deposition interval time. It does not need complicated vacuum environment, easy to be achieved in real life. In addition, it has no special requirements for coating matrix, which can run stably and significantly improve the precision and efficiency of coating. The lift coating machine we designed is suitable for the coating process of all solid materials such as silicon wafer, wafer, glass, ceramics, metal and so on, and it has extensive potentials in the coating market.

• Periodical: Applied Mechanics and Materials (Volumes 599-601)
• Pages: 268-271
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.599-601.268
• Online since: August 2014
• Authors: Ze Lun Li, You Jun Huang*, Xian Ling Deng
• Keywords: Coating Machine, Single Chip Microcomputer, Thin Film

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