Optimal Design of Voice Coil Motor for Micro Stage

Jae Heon Jeong; Myeong Hyeon Kim; Si Woong Woo; Dae Gab Gweon; Dong Pyo Hong

doi:10.4028/www.scientific.net/AMM.607.507

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 607Optimal Design of Voice Coil Motor for Micro Stage

Optimal Design of Voice Coil Motor for Micro Stage

Abstract:

Micro stages have been used for various purposes on such as industry inspection, positioning technology, and manufacturing of semi-conductor etc. These micro stages have voice coil motor for actuator. The actuator has to be properly made in confined volume to generate enough force to thrust the stage. Therefore, the voice coil motor, which is actuator for the micro stage, should be optimally designed. In this paper, it is described how to design the voice coil motor in an optimal way.

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Periodical:

Applied Mechanics and Materials (Volume 607)

Pages:

507-510

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.607.507

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Online since:

July 2014

Authors:

Jae Heon Jeong, Myeong Hyeon Kim, Si Woong Woo, Dae Gab Gweon, Dong Pyo Hong*

Keywords:

Micro Stage, Optimal Design, Voice Coil Motor

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* - Corresponding Author

References

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