Analysis of the Acceleration Sensor Effect of Castellated Triple Layer Piezoelectric Bimorph

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Abstract:

Symmetrical triple layer piezoelectric bimorph is commonly used as sensing element or actuation element. When used as acceleration sensing element, the sensitivity of the bimorph is desired to be high. Modifying size and piezoelectric materials is a commonly used method for the purpose of increasing bimorphs’ sensitivity. In this paper, a method of increasing bimorphs’ sensitivity by fabricating castellated structure on the surface of the bimorphs’ metal beam part is presented, and the model of the castellated bimorph is established by FEA.

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84-87

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September 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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