Intelligent Four-Probe Resistivity Meter Based on MCU

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Abstract:

Resistivity is an important parameter to determine the electrical properties of semiconductor materials, which can be obtained from four-probe measurement to get the doping concentration and other important information. This paper gives an introduction of an intelligent DC four-probe meter based on Micro-Controller Unit (MCU), including the principle, the overall framework and the function of each module. The design of hardware and software of the system are described. This instrument has the advantages of miniature size, modular structure, strong anti-interference ability and low power consumption.

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3552-3555

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September 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1109/4.808900

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