A Method of Precision Active Damper Control

Article Preview

Abstract:

This paper discusses the air spring of the lithography mechanic gravity compensation device and the working principle of pneumatic control structure, and introduces the related technical parameter design. Focus on the structure of vibration damping device design and classical control theory.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

45-52

Citation:

Online since:

September 2014

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2014 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] Wenjing Ding: Theory of Vibration Reduction, Beijing: Tsinghua University press, 1988. 60~65.

Google Scholar

[2] Guoping Li, Precision equipment basic theory and technology of active vibration isolation system, Introducing Journal of China Ordnance, 2004, 25(4): 462~466.

Google Scholar

[3] Jifeng Wang, Yuankai Li, Fractional order controller and the design of the fractional order lead lag corrector, Journal of Circuits and Systems, 2006, 10(5): 21~25.

Google Scholar

[4] Tomonori Kato, Kenji Kawashima, Koichi Sawamoto, Toshiharu Kagawa. Active control of a pneumatic isolation table using model following control and a pressure differentiator. Precision Engineering 31 (2007) 269–275.

DOI: 10.1016/j.precisioneng.2006.11.004

Google Scholar

[5] Valerio D, Sa' da Costa J. Time-domain implementation of fractional order controllers [A]. IEEE Proceddings: Control Theory and Applications, 2005, 152(5): 539-552.

DOI: 10.1049/ip-cta:20045063

Google Scholar