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A Method of Precision Active Damper Control
Abstract:
This paper discusses the air spring of the lithography mechanic gravity compensation device and the working principle of pneumatic control structure, and introduces the related technical parameter design. Focus on the structure of vibration damping device design and classical control theory.
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Pages:
45-52
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Online since:
September 2014
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Сopyright:
© 2014 Trans Tech Publications Ltd. All Rights Reserved
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