Design of Energy-Saving Piezoelectric Actuator Drive for High Frequency Servo Valve

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Abstract:

The paper presents a circuit topology favorable to drive piezoelectric actuators for high frequency servo valve. It begins with a short overview of different energy-saving PZA drive types and their tradeoff between efficiency and circuit complexity. Then the mechanical structure and equivalent model of the piezoelectric servo valve are described. And the circuit topology including an energy-saving oscillator, an efficient DC bias power and a repetitive controller especially for tracking reciprocating motion, is proposed. The efficiency-improved PZA drive is then derived from the above design. Finally, the drive together with the servo valve is tested in the simulation experiments.

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957-961

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September 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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[1] Jung, Jongchul, and Kunsoo Huh. Simulation tool design for the two-axis nano stage of lithogaphy systems. Mechatronics 20. 5 (2010): 574-581.

DOI: 10.1016/j.mechatronics.2010.06.003

Google Scholar

[2] Ullmann, Amos. The piezoelectric valve-less pump-performance enhancement analysis. Sensors and Actuators A: Physical 69. 1 (1998): 97-105.

DOI: 10.1016/s0924-4247(98)00058-2

Google Scholar

[3] Kenton, B. J., Andrew J. F. Compact ultra-fast vertical nano pottioner for improving scanning probe microscope scan speed. Review of Scientific Instruments. 82. 12 (2011): pp.123-133.

DOI: 10.1063/1.3664613

Google Scholar

[4] Moskalik, Andrew. Piezoelectric actuation: state of the art. (2001).

Google Scholar

[5] Information on http: /www. bsjm. com. cn.

Google Scholar

[6] Clingman, D. J. Drive Eleetronies for Large PiezoAetuators. Proc. Of SPIE: SanDiego; USA; (1997), pp.459-467.

Google Scholar

[7] Sun Yafei, Chen Renwen. Research of Charge-recovery on Piezoelectric Material. Piezoelectrics & Acoustooptics, 24. 1(2002): 71-75.

Google Scholar

[8] Du Zhibo. The Research of Switching PZT AmPlifier with Energy-recovery Based on PWM. Harbin Engineering University. (2009).

Google Scholar

[9] Liang Peng. Study on the forming methods and control technology of non-circular internal curve. Shandong University. (2014).

Google Scholar

[10] Zhou Miaolei. Piezoelectric Hydroelectric Servo Valve and its Control Method. Jilin University. (2004).

Google Scholar

[11] Inoue. T. Practical repetitive control system design. Proc. 29th CDC. Piscataway. (1990), pp.1673-1678.

Google Scholar