Influence of Quality and Accuracy of Sensors to Characterize Surfaces Using Atomic Force Microscopy

Gheorghe Ion Gheorghe; Vasile Bratu

doi:10.4028/www.scientific.net/AMM.656.335

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 656Influence of Quality and Accuracy of Sensors to...

Influence of Quality and Accuracy of Sensors to Characterize Surfaces Using Atomic Force Microscopy

Abstract:

This paper explains and demonstrates how an atomic force microscope (AFM) is working and how can be improved the measurements realized with this system. At the begining of the paper is a complex presentation of AFM and its improvement with capacitive sensors. Starting from the obtained information, we studied the influence of quality and linearity error of sensors to characterize surfaces using atomic force microscopy. We used the device that had sensors with a linearity error of 0.1%. For another set of measurements we used sensors with linearity error of 0.01%. Experiments realized on CoCrMo and Ti6Al4V materials surfaces demonstrated that the accuracy of sensors, respectively, the linearity error, from the measurement system has an important influence.

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Periodical:

Applied Mechanics and Materials (Volume 656)

Pages:

335-344

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.656.335

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Online since:

October 2014

Authors:

Gheorghe Ion Gheorghe*, Vasile Bratu

Keywords:

Accuracy, Atomic Force Microscopy, Linear Error, Sensor

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