Optimization of Reactive Sputtering Technology for Hard Coatings Deposition

Gabriela Strnad; Laszlo Jakab-Farkas; Sandor Papp; Albert Zsombor Fekete; Dominic Biro; Ioan Vida-Simiti

doi:10.4028/www.scientific.net/AMM.657.246

Paper Titles

A Simulation of Spot Welding Process
p.226

Finite Element Analysis to Predict the Mechanical Behavior of Lattice Structures Made by Selective Laser Melting Technology
p.231

Finite Element Analysis to Improve the Accuracy of Parts Made by Stainless Steel 316L Material Using Selective Laser Melting Technology
p.236

Experimental Study on Unsynchronized Ultrasonic Assistance of Electro Discharge Machining Process
p.241

Optimization of Reactive Sputtering Technology for Hard Coatings Deposition
p.246

Shear Resistance of Joints Spot Cold Pressure Welding
p.251

Study on Identification and Classification of Causes which Generate Welds Defects
p.256

Studies on the Corrosion Behavior of Deposits Carried out by Thermal Spraying in Electric ARC – Thermal Activated
p.261

Experimental Study of the Laser Cutting Process on 1C45 - 3 mm Steel
p.266

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 657Optimization of Reactive Sputtering Technology for...

Optimization of Reactive Sputtering Technology for Hard Coatings Deposition

Abstract:

The paper presents the research work carried out in order to optimize the technology and reactive magnetron sputtering system used for the deposition of hard, multielemental, multiphase coatings. On the basis of a model of dynamic pressure developed and validated by us, regulatory structures for dynamic pressure inside the deposition chamber were designed and implemented. By using this optimization, extensive experiments involving nanostructured (Ti, Al, Si)N coatings, with a thickness of approx. 2 μm, were carried out. Using TEM microscopy, SAED and Vickers microhardness characterizations the results of deposition system optimization on the microstructure and microhardness of thin films were investigated.

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Periodical:

Applied Mechanics and Materials (Volume 657)

Pages:

246-250

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.657.246

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Online since:

October 2014

Authors:

Gabriela Strnad*, Laszlo Jakab-Farkas, Sandor Papp, Albert Zsombor Fekete, Dominic Biro, Ioan Vida-Simiti

Keywords:

Hard Coatings, Nanostructured Coatings, Reactive Sputtering, Ti-Al-Si-N Coating

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