The Measurement Technique of Blind Hole Based on Capacitive Probe Sensor

Abstract:

There are many inconvenience in measuring the diameter of blind and deep holes. The measurement device can hardly stretch into the bottom. The paper is about a capacitive probe measurement system, the whole equipment includes capacitive probe sensor, the measured hole, precision drive part, two-dimensional micro-positioning platform. A simulation analysis was done for the structural parameters, and the eccentricity between the probe and the measured hole, then a reliable measurement results were obtained.

• Periodical: Applied Mechanics and Materials (Volumes 670-671)
• Pages: 1260-1263
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.670-671.1260
• Online since: October 2014
• Authors: Yu Zhen Ma*, Xuan Sun, Cheng Wang
• Keywords: Blind Hole, Capacitive Probe Sensor, Eccentricity, Measurement

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