Development and Research of MEMS

Suo Cheng Wang; Yong Ping Hao; Shuang Jie Liu

doi:10.4028/www.scientific.net/AMM.721.618

Paper Titles

Research on the Key Factors of Mis-Operations and Correct Operations of the Residual Current Operated Protective Device
p.599

Research and Application of UPS-CAN Protocol in Parallel System
p.603

Selective Harmonic Elimination PWM Technique with Walsh Functions for Nine-Level Cascade Inverter
p.607

An Active Equalization Technique Based on Flyback Converter Topology
p.612

Development and Research of MEMS
p.618

Capacitive Touch Sensing Principle and Application in the Car
p.622

Microcomputer Interface Experimental System Design
p.626

The Model of Estimating MTL Crosstalk in Inhomogeneous Medium
p.631

Research on Four Water-Filling Power Distribution Schemes in MU-MIMO System
p.635

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 721Development and Research of MEMS

Development and Research of MEMS

Abstract:

Microelectromechanical system (MEMS) is a new multi-disciplinary research field in recent years, which is an actuator or system composed of micro sensors, micro actuators, micro devices, signal processing system and control system. This paper mainly introduces the development of MEMS, technology characteristics, main processing materials and processing technology. At last it introduces the development and application of MEMS in the fuze system and aerospace system in detail for the future.

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Periodical:

Applied Mechanics and Materials (Volume 721)

Pages:

618-621

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.721.618

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Online since:

December 2014

Authors:

Suo Cheng Wang*, Yong Ping Hao, Shuang Jie Liu

Keywords:

Manufacture Material, Manufacture Technology, MEMS, Technical Characteristics

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* - Corresponding Author

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