Design and Flow Simulation on a Variable Structure Plasma Reaction Chamber

Wei Feng Liu; Yi Yong Yang; Lin Hong Ji; Jia Cheng

doi:10.4028/www.scientific.net/AMM.723.868

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 723Design and Flow Simulation on a Variable Structure...

Design and Flow Simulation on a Variable Structure Plasma Reaction Chamber

Abstract:

A new variable structure chamber was designed to plasma reaction with two-stage showerhead, and its flow filed dynamic control equation was analyzed and meshed by ICEM. The simulation research for the meshed models was analyzed by a commercial software-Fluent, by changing various parameters such as mass flow inlet, height, diameter and section of outlet. The result shows that the height and diameter variation for chamber has a little influence on the pressure upon susceptor. However, when the mass flow increases in inlet, the pressure improves, and it also changes as the section variation of outlet.

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Periodical:

Applied Mechanics and Materials (Volume 723)

Pages:

868-872

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.723.868

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Online since:

January 2015

Authors:

Wei Feng Liu, Yi Yong Yang*, Lin Hong Ji, Jia Cheng

Keywords:

Chamber, IC, Numerical Simulation, Structure

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* - Corresponding Author

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