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Study on the Manufacturing Process of Polymer Microfluidic Chip with Integrated Cu Micro Array Electrode

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Abstract:

To produce perfect polymer microfluidic chip with integrated metal micro array electrode, an oxygen-plasma assisted manufacturing process was developed. The Cu micro array electrodes on the poly substrate was formed by photolithography, sputtering and wet etching; the micro channels on the polymer plate were hot-embossed using metal master; the bonding of cover plate and substrate using thermal bonding. The surface of the polymer plate with micro channels was treated by oxygen-plasma before thermal bonding. The oxygen-plasma treatment could decrease thermal bonding temperature from 100 °C to 85 °C. The bonding of this chip is complete, the micro electrode array keeps its integrity, and the micro channel is not distorted obviously.

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Applied Mechanics and Materials III View Preview

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Periodical:

Applied Mechanics and Materials (Volume 723)

Pages:

884-887

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.723.884

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Online since:

January 2015

Authors:

Yao Xin Gu, Hong Chao Qiao*

Keywords:

Fracture, Micro Array Electrode, Microfluidic Chips, Thermal Bonding

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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