Study on Spatial Frequency Domain Algorithm and White Light Interference System Based on NMM

Li Jian; Li Hua Lei; Dong Sheng Li; Yun Xia Fu; Yuan Li; Jia Cheng Hu; Lin Juan Deng

doi:10.4028/www.scientific.net/AMM.738-739.904

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 738-739Study on Spatial Frequency Domain Algorithm and...

Study on Spatial Frequency Domain Algorithm and White Light Interference System Based on NMM

Abstract:

White light interference technique for topography measurement effectively avoids phase ambiguity in phase-shifting interferometry. The spatial frequency domain algorithm based on scanning white light interference technique has the advantage of insensitivity to noise and higher calculation accuracy compared with other methods. The white light interference sensor is constructed based on nano positioning and nano measuring machine (NMM), the calibrated step height standard of 100±3nm is measured. The spatial frequency domain algorithm is adopted for data processing, the repetitive test result of 97.9nm and standard deviation of 0.48nm are achieved. To verify the measuring ability of complex device, the number ‘242’ on ink box is measured and three-dimensional reconstruction is conducted. The high precision and traceable measurements of micro/nano scale step height standard and complex devices are realized by the white light interference system based on NMM with steady frequency laser interferometer built-in.

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Periodical:

Applied Mechanics and Materials (Volumes 738-739)

Pages:

904-910

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.738-739.904

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Online since:

March 2015

Authors:

Li Jian, Li Hua Lei, Dong Sheng Li*, Yun Xia Fu, Yuan Li, Jia Cheng Hu, Lin Juan Deng

Keywords:

Nano Positioning and Nano Measuring Machine (NMM), Spatial Frequency Domain Algorithm, Three Dimensional Topography, Traceable Measurement, White Light Interference

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* - Corresponding Author

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