A novel adaptive force control table for rotary ultrasonic machine tool was developed for processing micro holes. The adaptive force control table, a mechanical balancing device by which the load can be adaptively adjusted without numerical control was adopted as an attachment in an ultrasonic machine tool. To verify the performance, micro holes were drilled on SiC workpiece. The drilling force, tool wear and profiles of these machined micro holes were investigated. According to the experimental results, it is confirmed that the newly developed table attached on the ultrasonic machine tool is an economical and efficient approach for machining micro holes on hard and brittle materials.