Design of Applied Diffusion Pump System for Electron Beam Process

Yan Jin; Jian Jun Hu; Hong Bin Xu

doi:10.4028/www.scientific.net/AMM.80-81.1295

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 80-81Design of Applied Diffusion Pump System for...

Design of Applied Diffusion Pump System for Electron Beam Process

Abstract:

Efficiency of vacuumizing is vital to process time with electron beam. The system principle of vacuum system was designed based on the analysis of system request. The workflow of vacuum system was established and its characteristic was introduced. The controlling theory and circuit of vacuum system was designed while vacuum device was made and its performance was tested. The vacuum system was acquired which was suitable to electronic beam.

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Periodical:

Applied Mechanics and Materials (Volumes 80-81)

Pages:

1295-1299

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.80-81.1295

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Online since:

July 2011

Authors:

Yan Jin, Jian Jun Hu, Hong Bin Xu

Keywords:

Diffusion Pump, Electron Beam, Vacuum System

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References

[1] HU Jianjun; XU Hongbin; JIANG Peng; Precision Electronic Beam Machining Technology on Mould. Machine Tool & Hydraulics. 2007, 35(11): 40-41.

Google Scholar

[2] V.V. Parkhomchuk1, V.B. Reva1 and B.A. Skarbo1. Vacuum pumping with an electron beam. Instruments and Experimental Techniques. 2006, 49(3): 446-448.

Google Scholar

[3] WANG Long; LI Hong-cai; LU Sheng-ming. A Novel Automatic Litter Suction Equipment Driven by Vacuum Vortex Pump for Laboratory Animal Barrier Facilities. Laboratory Animal Science, 2010, 27(1): 43-44.

Google Scholar

[4] XIE Yuan-lai; HU Chun-dong; OUYANG Zheng-rong; Design of vacuum system for neutral beam injector. Vacuum, 2006, 43(4)26-28.

Google Scholar

[5] HU Jianjun;, CHEN Yuanfang, XU Hongbin, The Design of Vacuum System for Electron Beam Process. MACHINE TOOL & HYDRAULICS. 2010, 38(14): 1-2, 9.

Google Scholar

[6] HU Qing-sheng, CHEN Ke. Reliability analysis of designing HT-7U vacuum pumping systems. Vacuum, 2004, 41(2): 51-54.

Google Scholar