Fabrication and Analysis of a Tunable Inductor

Abstract:

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This paper reports the fabrication of a tunable radio-frequency (RF) inductor and discusses the parameters that influence the quality factor (Q) of the inductor. The influence of the thickness of the metal layer on Q is mainly emphasized when other parameters are fixed. In the process of the fabrication, SU-8 is used as photoresist instead of the traditional photoresist. This paper aims to get higher Q for the tunable inductor.

Info:

Periodical:

Edited by:

Linli Xu, Wenya Tian and Elwin Mao

Pages:

990-995

DOI:

10.4028/www.scientific.net/AMM.80-81.990

Citation:

J. L. Liu et al., "Fabrication and Analysis of a Tunable Inductor", Applied Mechanics and Materials, Vols. 80-81, pp. 990-995, 2011

Online since:

July 2011

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$35.00

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