Fabrication and Analysis of a Tunable Inductor

Jian Lin Liu; Xiang Hong Li; Bin Zhen Zhang; Jian Zhang; Chang Hong Ji; Hai Tao Yao

doi:10.4028/www.scientific.net/AMM.80-81.990

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 80-81Fabrication and Analysis of a Tunable Inductor

Fabrication and Analysis of a Tunable Inductor

Abstract:

This paper reports the fabrication of a tunable radio-frequency (RF) inductor and discusses the parameters that influence the quality factor (Q) of the inductor. The influence of the thickness of the metal layer on Q is mainly emphasized when other parameters are fixed. In the process of the fabrication, SU-8 is used as photoresist instead of the traditional photoresist. This paper aims to get higher Q for the tunable inductor.

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Periodical:

Applied Mechanics and Materials (Volumes 80-81)

Pages:

990-995

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.80-81.990

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Online since:

July 2011

Authors:

Jian Lin Liu, Xiang Hong Li, Bin Zhen Zhang, Jian Zhang, Chang Hong Ji, Hai Tao Yao

Keywords:

Inductor, Quality Factor (Q), Radio Frequency, SU-8

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