Fabrication and Analysis of a Tunable Inductor
This paper reports the fabrication of a tunable radio-frequency (RF) inductor and discusses the parameters that influence the quality factor (Q) of the inductor. The influence of the thickness of the metal layer on Q is mainly emphasized when other parameters are fixed. In the process of the fabrication, SU-8 is used as photoresist instead of the traditional photoresist. This paper aims to get higher Q for the tunable inductor.
Linli Xu, Wenya Tian and Elwin Mao
J. L. Liu et al., "Fabrication and Analysis of a Tunable Inductor", Applied Mechanics and Materials, Vols. 80-81, pp. 990-995, 2011