Design and Analysis on Symmetric MEMS Inductor

N. Khalid; N.I.M. Nor; W.M.W. Norhaimi; Zaliman Sauli; Vithyacharan Retnasamy

doi:10.4028/www.scientific.net/AMM.815.364

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 815Design and Analysis on Symmetric MEMS Inductor

Design and Analysis on Symmetric MEMS Inductor

Abstract:

This paper presents the design and analysis of new proposed topology micro-electro-mechanical system (MEMS) inductor. This new symmetric MEMS inductor is designed to reduce the total length of the conductor strip and hence reduce the resistance of the metal tracks. This results significant increases in the quality (Q) factor of the inductor. In this paper, the MEMS inductor is designed using CoventorWare®, which is powerful software for MEMS computer aided design (CAD), modeling and simulation. Results indicate that new symmetric inductor topology has thehighest Q-factor and it hasbeenimproved bytwo times compared to circular inductor. The analysis revealed that area of the symmetric inductor has reduced by37.5% compared to the circular inductor. Result has proved that the reduction of length of the conductor strip has reduced the resistance of the metal tracks and results in a high Q-factor inductor.

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Periodical:

Applied Mechanics and Materials (Volume 815)

Pages:

364-368

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.815.364

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Online since:

November 2015

Authors:

N. Khalid, N.I.M. Nor, W.M.W. Norhaimi, Zaliman Sauli, Vithyacharan Retnasamy

Keywords:

Length, Resistance, Q-Factor, Symmetric MEMS Inductor

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References

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