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The Current Status of Development and Applications of Wave-Heated Discharge Plasma Sources

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Abstract:

Wave-heated discharges are well known as high-efficiency methods to generate high-density plasma at low pressures. In this paper, three types of plasma sources based on different wave-heated discharge principles are introduced systematically. Electron cyclotron resonance plasma, helicon wave plasma, and surface wave plasma systems are promising to be the next generation of plasma sources to meet increasingly strict requirements in microelectronics industry due to their remarkable advantages over conventional plasma sources.

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Periodical:

Advanced Materials Research (Volumes 1006-1007)

Pages:

193-199

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1006-1007.193

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Online since:

August 2014

Authors:

Ming Lu Cao, Jia Cheng, Chuan Kun Han, Lin Hong Ji

Keywords:

ECR Plasma, Helicon Plasma, Plasma Source, Surface Wave Plasma, Wave-Heated Discharge

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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