Design and Analysis for a Nano-Positioning Micro-Motion Platform Driven by Piezoelectric Ceramic Linear Motors

Hai Bo Lin; Guo Zhe Yang

doi:10.4028/www.scientific.net/AMR.102-104.402

Paper Titles

Implementation of OMRON Servo Positioning Controllers in Automatic Terminal Crimping Machine
p.383

Temperature Tag Based on Active RFID
p.387

Error Compensation in Turning Operation of Slender Shaft Using a Fuzzy PID Controller
p.392

Modeling and Error Analysis of Monocular Stereo Vision System for Large-Scale Workpiece On-Machine Measurement
p.397

Design and Analysis for a Nano-Positioning Micro-Motion Platform Driven by Piezoelectric Ceramic Linear Motors
p.402

Numerical Simulation and Experimental Research on MAG Surfacing Deposited with Electro-Magnetic Stirring Controlling
p.407

A Study on the Application Scheme for RFID-Tech Based Process Management in the Sewing Workshop of Clothing Companies
p.412

Research on Realization and Application of Uniformly Accelerated Motion in NC Systems
p.417

Improved Freeman-Newell Functional Reasoning Model for Conceptual Design of Manufacturing Process Control Strategies
p.422

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 102-104Design and Analysis for a Nano-Positioning...

Design and Analysis for a Nano-Positioning Micro-Motion Platform Driven by Piezoelectric Ceramic Linear Motors

Abstract:

Micro-EDM provides the potential feasibility for the nano-scale precision machining, and Micro-EDM is suitable for three-dimensional complicated structure processing. A three-dimensional model is conducted in this paper, and the key factors of a platform are analysed in detail, the positioning accuracy of the platform is tested on this basis of the model. The results of the test show that dynamic behavior and stability of this mechanism has many advantages of quick response, smooth, ultra low speed and super resolution etc. High positioning accuracy can be achieved by this platform, so it complies with the requirement of micro-EDM.

You might also be interested in these eBooks

Digital Design and Manufacturing Technology

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 102-104)

Pages:

402-406

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.102-104.402

Citation:

Cite this paper

Online since:

March 2010

Authors:

Hai Bo Lin, Guo Zhe Yang

Keywords:

Micro-Motion Platform, Nano Positioning, Piezoelectric Ceramic (PZT)

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] L.N. Sun, W.B. Rong and D.S. Qu: Optics and Precision Engineering, Vol. 6 (2001), pp.514-518.

Google Scholar

[2] Y.F. Dai and X.Q. Peng: Optics and Precision Engineering, Vol. 4 (2000), pp.355-359.

Google Scholar

[3] Y.G. Cui et al: China Mechanical Engineering, Vol. 2 (2003), pp.164-167.

Google Scholar

[4] Y.L. He, H.J. Zhang and X.F. Lin: Optical Instruments, (2004), p.72.

Google Scholar

[5] D.G. Jie, et al: Optics and Precision Engineering, Vol. 13 (2005), pp.171-178.

Google Scholar

[6] B.C. Goo, et al: Proceedings of the 2001 IEEE/RSJ Systems Maui, Hawaii, USA, (2001).

Google Scholar

[7] Tim King, Michele Pozzi and Angelo Mannara, Power Engineering Journal, June (2000). Fig. 4 Motion curve of the platform (load is 2. 5 kg) Fig. 3 Step amplification (100 nm).

Google Scholar