Design and Analysis for a Nano-Positioning Micro-Motion Platform Driven by Piezoelectric Ceramic Linear Motors
Micro-EDM provides the potential feasibility for the nano-scale precision machining, and Micro-EDM is suitable for three-dimensional complicated structure processing. A three-dimensional model is conducted in this paper, and the key factors of a platform are analysed in detail, the positioning accuracy of the platform is tested on this basis of the model. The results of the test show that dynamic behavior and stability of this mechanism has many advantages of quick response, smooth, ultra low speed and super resolution etc. High positioning accuracy can be achieved by this platform, so it complies with the requirement of micro-EDM.
Guozhong Chai, Congda Lu and Donghui Wen
H. B. Lin and G. Z. Yang, "Design and Analysis for a Nano-Positioning Micro-Motion Platform Driven by Piezoelectric Ceramic Linear Motors", Advanced Materials Research, Vols. 102-104, pp. 402-406, 2010